Description
The FS1027 MEMS Liquid Flow Sensor Module measures the flow rate using the thermo-transfer (calorimetric) principle. The FS1027 is designed to measure liquids.
The FS1027 offers key advantages over resistor-based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio. The sensor comprises a “solid” thermal isolation technology and silicon-carbide coating, which protects it from abrasive wear and provides robustness and longterm reliability. In comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base.

FEATUREs
◾ Liquid flow: 0 to 10 liters/min
◾ Robust “solid” isolation technology
◾ Resistant to surface contamination
◾ No cavity to cause clogging
◾ Resistant to vibration and pressure shock
◾ Low-power application
◾ Minimal flow resistance
◾ Fast response: < 5ms
◾ Flow voltage output: 0V to 4.5V (uncalibrated)
◾ Thermistor voltage output: 1V to 4.5V
◾ Supply voltage: 5V
◾ Module operating temperature range: 5°C to +75°C

Typical Applications
◾ Beverage equipment
◾ Liquid-dispensing system
◾ Process controls and monitoring
◾ Fluid leak detection