Dual Axis Silicon Accelerometer Die

The MTX2-02G series capacitive silicon accelerometer sensors are manufactured in class 10 clean room using state of the art CMOS and bulk micro-machining capabilities. They are manufactured in six inched wafers, utilizing DRIE techniques and patented processes.

FEATURES
- Excellent accuracy over 2g range
- Good temperature performance
- Low cost design
- Capacitive, high performance
- 100% factory tested
- High volume manufacturing
- Patented process

THE MAIN FIELD OF APPLICATIONS
- Acceleration Measurement
- Vibration measurement
- Inclination Measurement