S8551, S8552 and S8553 are VUV (Vacuum UV) photodiodes suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide optimal performance in the VUV range, these photodiodes offer more stable sensitivity even after long exposure to VUV radiation compared with conventional types.

Features
Reliable detection improves of ArF excimer laser (λ=193 nm)
Large active area
  S8551: 5.8 × 5.8 mm
  S8552: 10 × 10 mm
  S8553: 18 × 18 mm
Windowless package
  S8551: TO-8 metal package
  S8552: 16.5 × 15.0 mm ceramic package
  S8553: 25.5 × 25.5 mm ceramic package

APPLICATIONs
ArF excimer laser detection
Detection of various UV light sources