SCA100T 查看數據表（PDF） - Murata Manufacturing
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SCA100T Datasheet PDF : 17 Pages
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Data Sheet
SCA100T Series
THE SCA100T DUAL AXIS INCLINOMETER SERIES
The SCA100T Series is a 3D-MEMS-based dual axis inclinometer family that provides instrumentation grade
performance for leveling applications. The measuring axes of the sensing elements are parallel to the mounting
plane and orthogonal to each other. Low temperature dependency, high resolution and low noise, together a with
robust sensing element design, make the SCA100T the ideal choice for leveling instruments. The Murata
inclinometers are unsensitive to vibration, due to their over damped sensing elements, and can withstand
mechanical shocks of up to 20000 g.
Features
Dual axis inclination measurement (X and Y)
Measuring ranges ±30° SCA100T-D01 and
± 90° SCA100T-D02
0.0035° resolution (10 Hz BW, analog output)
Sensing element controlled over damped
frequency response (-3dB 18Hz)
Robust design, high shock durability (20000g)
High stability over temperature and time
Single +5 V supply
Ratiometric analog voltage outputs
Digital SPI inclination and temperature output
Comprehensive failure detection features
o True self test by deflecting the sensing
elements’ proof mass by electrostatic force.
o Continuous sensing element interconnection
failure check.
o Continuous memory parity check.
RoHS compliant
Compatible with Pb-free reflow solder process
Applications
Platform leveling and stabilization
360° vertical orientation measurement
Leveling instruments
Construction levels
12 VDD
Sensing
element 1
Signal conditioning
and filtering
10 ST_1
9 ST_2
Self test 1
Self test 2
EEPROM
calibration
memory
Temperature
Sensor
Sensing
element 2
Signal conditioning
and filtering
A/D conversion
SPI interface
11 OUT_1
1 SCK
3 MISO
4 MOSI
7 CSB
5 OUT_2
Figure 1. Functional block diagram
6 GND
Murata Electronics Oy
www.muratamems.fi
Subject to changes
Doc.Nr. 8261800
1/17
Rev.B2
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